Updated on 2025/08/06

写真a

 
SHIMIZU,Tomohiro
 
Organization
Faculty of Engineering Science Professor
Title
Professor
Contact information
メールアドレス
External link

Degree

  • 博士(工学)

Research Areas

  • Nanotechnology/Materials / Nanomaterials

Professional Memberships

Committee Memberships

  • ナノ学会   ナノ構造・物性 副部会長  

    2021.4   

      More details

  • International Microprocess and Nanotechnology Conference   Program Committee Member  

    2018.4   

      More details

  •   応用物理学会 プログラム編集委員  

    2011.4 - 2014.3   

      More details

Papers

  • Electrochemical Biosensor Using Methylene Blue as an Electrochemical Mediator Coupling with DNA Aptamer

    Koki Yamashita, Tomohiro Shimizu, Shoso Shingubara, Hitoshi Ishida, Akinori Kuzuya, Takeshi Ito

    2024 IEEE SENSORS   1 - 4   2024.10

     More details

    Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    DOI: 10.1109/sensors60989.2024.10784712

    researchmap

  • Evaluating the Anti-biofilm Performance of Si and Resin Based Nanopillars

    Satoka Matsumoto, Shigemitsu Tanaka, Toshihiro Nagao, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    Journal of Photopolymer Science and Technology   37 ( 4 )   379 - 384   2024.6

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Technical Association of Photopolymers, Japan  

    DOI: 10.2494/photopolymer.37.379

    researchmap

  • Bactericidal Performance of Nanostructures Resin Surfaces: Nanopillars versus Nanocones Reviewed

    Zihao Zhao, Yuito Matsushita, Natsuki Ogawa, Gakuto Inoue, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    ACS Applied Nano Materials   7 ( 12 )   14040 - 14049   2024.6

     More details

    Publishing type:Research paper (scientific journal)   Publisher:American Chemical Society (ACS)  

    DOI: 10.1021/acsanm.4c01288

    researchmap

  • Antifouling performance against SiO<sub>2</sub> particulate matter adhesion of cyclo olefin polymer nanopillar surfaces

    Zihao Zhao, Nan Liang, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    Environmental Science: Nano   11 ( 10 )   4359 - 4371   2024

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Royal Society of Chemistry (RSC)  

    The global challenge of soil-derived fine particles, mainly composed of silicon dioxide (SiO<sub>2</sub>) and recognized as particulate matter (PM), presents a significant environmental and economic issue, notably contributing to air pollution.

    DOI: 10.1039/d4en00152d

    researchmap

  • Electroless Plating of Ru Using Hydrazine Hydrate as a Reducing Agent

    Ryota Saida, Tomohiro Shimizu, Takeshi Ito, Yukihiro Tominari, Shukichi Tanaka, Naoki Fukumuro, Shinji Yae, Shoso Shingubara

    Journal of Electronic Materials   52 ( 10 )   6690 - 6698   2023.7

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Springer Science and Business Media LLC  

    DOI: 10.1007/s11664-023-10605-5

    researchmap

    Other Link: https://link.springer.com/article/10.1007/s11664-023-10605-5/fulltext.html

  • Cicada wing-inspired artificial nanopatterns with antifouling properties for clay adhesion

    Zihao Zhao, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    Physica Scripta   98 ( 8 )   085929 - 085929   2023.7

     More details

    Publishing type:Research paper (scientific journal)   Publisher:IOP Publishing  

    Abstract

    To clarify the antifouling properties of cicada-inspired nanostructured surfaces and search for a long-term usable antifouling material, the wings of two types of cicadas in Japan, Graptopsaltria nigrofuscata (GN) and Cryptotympana facialis (CF), were examined by surface wettability and surface free energy. Furthermore, considering the complexity and mechanical stability of natural nanostructured surfaces, we mimicked both cicada wing surfaces by combining nanosphere lithography and metal-assisted chemical etching (MacEtch) on Si wafer, which is low-cost and large-area pattern-fabricable. We obtained artificial nanopatterns with pillar pitches of 200, 500, and 1000 nm (naming 200, 500, and 1000 series). As a result, comparing artificial nanopatterns with cicada wings indicated that nanopillar structures with high roughness factors or structural aspect ratios are likely to have excellent hydrophobic properties and antifouling features. Cryptotympana facialis wings and 200 series Si samples showed less clay particle adhesion than other patterns. These results indicate smaller structured surfaces where air may get trapped, resulting in hydrophobic surfaces contributing to self-cleaning or fouling-release properties. Further, reducing the contact area between nanostructures and clay can be used as an effective strategy to prevent clay adhesion has been proposed, but it has targeted limitations. Herein, we present a novel insight that more fine and high-structural-density nanostructural patterns are universal to prevent clay adhesion.

    DOI: 10.1088/1402-4896/ace562

    researchmap

    Other Link: https://iopscience.iop.org/article/10.1088/1402-4896/ace562/pdf

  • Fabrication and characterization of field-effect transistors based on MoS2 nanotubes prepared in anodic aluminum oxide templates

    Naoya Shiraiwa, Kyosuke Murata, Takuto Nakazawa, Akihiro Fukawa, Koichi Takase, Takeshi Ito, Shoso Shingubara, Tomohiro Shimizu

    Micro and Nano Engineering   19   100200 - 100200   2023.6

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Elsevier BV  

    DOI: 10.1016/j.mne.2023.100200

    researchmap

  • Fluorescence Intensity of Liposomes and <i>E. coli</i> Attached to Nanopillar Arrays: Implications for Bacterial Death on Nanostructures

    Masato Daimon, Yushi Yanagisawa, Kenta Ishibashi, Yukihiro Tominari, Shukichi Tanaka, Hiroaki Kojima, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    ACS Applied Nano Materials   6 ( 3 )   1610 - 1619   2023.1

     More details

    Publishing type:Research paper (scientific journal)   Publisher:American Chemical Society (ACS)  

    DOI: 10.1021/acsanm.2c04489

    researchmap

  • Fabrication and UV photoresponse of ordered ZnO nanonets using monolayer colloidal crystal template

    Yusuke Kiyomi, Naoya Shiraiwa, Takuto Nakazawa, Akihiro Fukawa, Kaito Oshio, Koichi Takase, Takeshi Ito, Shoso Shingubara, Tomohiro Shimizu

    Micro and Nano Engineering   16   100160 - 100160   2022.8

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Elsevier BV  

    DOI: 10.1016/j.mne.2022.100160

    researchmap

  • Bactericidal effect of nanostructures <i>via</i> lytic transglycosylases of <i>Escherichia coli</i>

    Soma Mimura, Tomohiro Shimizu, Shoso Shingubara, Hiroaki Iwaki, Takeshi Ito

    RSC Advances   12 ( 3 )   1645 - 1652   2022

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Royal Society of Chemistry (RSC)  

    The time profiles of active cell ratios depended on the growth phase and the absence of some lytic transglycosylases of E. coli. Significant cell damage was not found on the autolysis inhibition condition.

    DOI: 10.1039/d1ra07623j

    researchmap

  • Detailed analysis of liposome adsorption and its rupture on the liquid-solid interface monitored by LSPR and QCM-D integrated sensor Reviewed

    Sensing and Bio-Sensing Research   32, 100415   2021

     More details

  • Formation of Ultrathin Segregated-Ge Crystal on Al/Ge(111) Surface Reviewed

    Masato Kobayashi, Akio Ohta, Masashi Kurosawa, Masaaki Araidai, Noriyuki Taoka, Tomohiro Simizu, Mitsuhisa Ikeda, Katsunori Makihara, Seiichi Miyazaki

    Jpn. J. Appl. Phys.   50, SGGK15   2020

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ab69de

    Web of Science

    researchmap

  • Electrochemical Impedance Spectroscopy Study of Liposome Adsorption and Rupture on Self-Assembled Monolayer: Effect of Surface Charge Reviewed

    Journal of Electroanalytical Chemistry   878,114572   2020

     More details

  • Observation of ultra-high energy density state with x-ray free electron laser SACLA Reviewed

    Y. Maeda, Y. Hironaka, T. Iwasaki, K. Kawasaki, Y. Sakawa, T. Izumi, M. Ota, S. Egashira, Y. Nakagawa, N. Higashi, Y. Sentoku, R. Kodama, N. Ozaki, T. Matsuoka, T. Somekawa, T. Yabuuchi, Y. Inubushi, T. Togashi, A. Kon, K. Sueda, K. Miyanishi, S. Shingubara, T. Shimizu, A. Okumura, K. Shigemori

    High Energy Density Physics   36, 100813   100813 - 100813   2020

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Elsevier BV  

    DOI: 10.1016/j.hedp.2020.100813

    researchmap

  • Formation of MoS2 nanostructure arrays using anodic aluminum oxide template Reviewed

    Micro and Nano Engineering   9, 100071   2020

     More details

  • Adhesion and bactericidal properties of nanostructured surfaces dependent on bacterial motility

    Keisuke Jindai, Kazuki Nakade, Kyosuke Masuda, Takashi Sagawa, Hiroaki Kojima, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    RSC Advances   10 ( 10 )   5673 - 5680   2020

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Royal Society of Chemistry  

    DOI: 10.1039/c9ra08282d

    Scopus

    researchmap

  • Nano-honeycomb electrode based QCM sensor and its application for PPI detection Reviewed

    IEEE Sensors Journal   19, 4025-4030   2019

     More details

  • Effect of additives on preparation of vertical holes in Si substrate using metal-assisted chemical etching Reviewed

    Jpn. J. Appl. Phys.   58, SDDF06-1-4   2019

     More details

  • Effect of a metal interlayer under Au catalyst for the preparation of microscale holes in Si substrate by metal-assisted chemical etching Reviewed

    Jpn. J. Appl. Phys.   58, SAAE07-1-5   2019

     More details

  • Time-lapse imaging of bactericidal effect on nanostructural surface

    Takeshi Ito, Kazuki Nakade, Keisuke Jindai, Takashi Sagawa, Hiroaki Kojima, Tomohiro Shimizu, Shoso Shingubara

    Proceedings of SPIE - The International Society for Optical Engineering   10965   2019

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:SPIE  

    DOI: 10.1117/12.2514492

    Scopus

    researchmap

  • Threshold switching of a NbOx device prepared by DC reactive sputtering

    Ryo Nakajima, Atsushi Azuma, Tomohiro Shimizu, Takeshi Ito, Shoso Shingubara

    Japanese Journal of Applied Physics   58   2019

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Institute of Physics Publishing  

    DOI: 10.7567/1347-4065/ab12c5

    Scopus

    researchmap

  • Single cell / real-time imaging of bactericidal effect on the nanostructural surface

    Kazuki Nakade, Keisuke Jindai, Takashi Sagawa, Hiroaki Kojima, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    Materials Today: Proceedings   7   497 - 500   2019

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Elsevier Ltd  

    DOI: 10.1016/j.matpr.2018.11.115

    Scopus

    researchmap

  • Investigation of nanostructure-based bactericidal effect derived from a cicada wing by using QCM-D

    Keisuke Jindai, Kazuki Nakade, Takashi Sagawa, Hiroaki Kojima, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    Materials Today: Proceedings   7   492 - 496   2019

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Elsevier Ltd  

    DOI: 10.1016/j.matpr.2018.11.114

    Scopus

    researchmap

  • Dual Biosensor Coupling with Localized Surface Plasmon Resonance and QCM-D Using Nano-honeycomb Structure

    Takeshi Ito, Hideaki Terasawa, Naohiro Matsumoto, Tomohiro Shimizu, Shoso Shingubara

    Materials Today: Proceedings   7   470 - 475   2019

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Elsevier Ltd  

    DOI: 10.1016/j.matpr.2018.11.111

    Scopus

    researchmap

  • Adhesion and Bactericidal Properties of a Wettability-Controlled Artificial Nanostructure

    Kazuki Nakade, Keisuke Jindai, Takashi Sagawa, Hiroaki Kojima, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    ACS Applied Nano Materials   1 ( 10 )   5736 - 5741   2018.10

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:American Chemical Society  

    DOI: 10.1021/acsanm.8b01340

    Scopus

    researchmap

  • Evaluation of the interdiffusion properties of Cu and electroless-plated CoWB barrier films formed on silicon substrate Reviewed

    Jpn. J. Appl. Phys.   57, 07MB02   2018.7

     More details

  • Hf layer thickness dependence of resistive switching characteristics of Ti/Hf/HfO2/Au resistive random access memory device Reviewed

    Jpn. J. Appl. Phys.   57, 02HD06   2018.6

     More details

  • Switching behavior of resistive change memory using oxide nanowires Reviewed

    Jpn. J. Appl. Phys.   57, 02HD07   2018.6

     More details

  • Highly sensitive quartz crystal microbalance based biosensor using Au dendrite structure

    Naoto Asai, Hideaki Terasawa, Tomohiro Shimizu, Shoso Shingubara, Takeshi Ito

    Japanese Journal of Applied Physics   57 ( 2 )   2018.2

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Japan Society of Applied Physics  

    DOI: 10.7567/JJAP.57.02CD01

    Scopus

    researchmap

  • Voltage pulse induced resistance change response of ReRAM with HfO2 layer Reviewed

    ECS Transactions   86, 13-21   2018

     More details

  • Fabrication of highly sensitive QCM sensor using AAO nanoholes and its application in biosensing Reviewed

    Sensors and Actuators B   276, 534-539   2018

     More details

  • Nonenzymatic detection of glucose using BaCuO2 Thin layer Reviewed

    ITO T, ASADA T, ASAI N, SHIMIZU T, SHINGUBARA S

    Jpn. J. Appl. Phys. IOP PUBLISHING LTD   56, 01AH02   2017.5

     More details

  • Fabrication and characterization of nano porous lattice biosensor using anodic aluminum oxide substrate

    Ito Takeshi, Matsuda Yuki, Jinba Takatoshi, Asai Naoto, Shimizu Tomohiro, Shingubara Shoso

    Jpn. J. Appl. Phys.   56, 06GG02 ( 6 )   06GG02   2017.5

     More details

    Language:English   Publisher:Institute of Physics  

    Localized surface plasmon resonance (LSPR) attracts attention for the fabrication of a biosensor because it can be used easily and is highly sensitive to the change in surface reflective index. Anodic aluminum oxide (AAO) has self-assembled nanoholes and is fabricated easily all over the Al substrate. The depth and diameter of the nanoholes are easily controlled by changing the etching solution and applied voltage. By depositing a Au thin film on the AAO substrate, the sensitivity of the sensor chip was affected by both optical interference and LSPR. In this study, the optical property of the AAO-based LSPR sensor chip was characterized on the basis of the nanostructure. We presented a biosensing application of the AAO-based LSPR sensor chip. The highest sensitivity of the sensor chip was observed at the AAO nanohole diameter of 75 nm and the AAO nanohole depth of 0.5 µm, when bovine serum albumin (BSA) adsorbed on the sensor chip.

    DOI: 10.7567/JJAP.56.06GG02

    researchmap

  • Sensitized mass change detection using Au nanoporous electrode for biosensing Reviewed

    Asai Naoto, Terasawa Hideaki, Shimizu Tomohiro, Shingubara Shoso, Ito Takeshi

    IOP PUBLISHING LTD,Jpn. J. Appl. Phys.   56, 06GG04 ( 6 )   06GG04   2017.5

     More details

    Language:English   Publisher:Institute of Physics  

    Nanostructured Au was obtained on an electrode of a quartz crystal microbalance (QCM) chip by anodization in an oxalic acid solution. The effective surface area was expanded by these nanostructures and evaluated by electrochemical measurement, scanning electron microscopy (SEM), and atomic force microscopy (AFM). Several morphologies, such as a nanosphere and a spongy structure, were observed under various anodic conditions. We demonstrated that a QCM chip with an anodized Au electrode was effective in biosensing because of its large surface area. The frequency shift corresponding to an antigen–antibody reaction improved on a Au nanosphere electrode compared with a flat surface electrode and spongy structure.

    DOI: 10.7567/JJAP.56.06GG04

    researchmap

  • Fabrication and Characterization of Nano-Porous Lattice Biosensor Using Anodic Aluminum Oxide Substrate Reviewed

    Ito Takeshi, Matsuda Yuki, Jinba Takatoshi, Asai Naoto, Shimizu Tomohiro, Shingubara Shoso

    Jpn. J. Appl. Phys.   56, 06GG02 ( 6 )   06GG02   2017.5

     More details

    Language:English   Publisher:Institute of Physics  

    Localized surface plasmon resonance (LSPR) attracts attention for the fabrication of a biosensor because it can be used easily and is highly sensitive to the change in surface reflective index. Anodic aluminum oxide (AAO) has self-assembled nanoholes and is fabricated easily all over the Al substrate. The depth and diameter of the nanoholes are easily controlled by changing the etching solution and applied voltage. By depositing a Au thin film on the AAO substrate, the sensitivity of the sensor chip was affected by both optical interference and LSPR. In this study, the optical property of the AAO-based LSPR sensor chip was characterized on the basis of the nanostructure. We presented a biosensing application of the AAO-based LSPR sensor chip. The highest sensitivity of the sensor chip was observed at the AAO nanohole diameter of 75 nm and the AAO nanohole depth of 0.5 µm, when bovine serum albumin (BSA) adsorbed on the sensor chip.

    DOI: 10.7567/JJAP.56.06GG02

    researchmap

  • Antibacterial property of Si nanopillar array fabricated using metal assisted etching; Mimic a cicada wing

    T. Ito, K. Nakade, N. Asai, T. Shimizu, S. Shingubara

    ECS Transactions   75 ( 53 )   1 - 5   2017

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Electrochemical Society Inc.  

    DOI: 10.1149/07553.0001ecst

    Scopus

    researchmap

  • Fabrication and optical property of metal nanowire arrays embedded in anodic porous alumina membrane

    Kouichi Takase, Tomohiro Shimizu, Kosuke Sugawa, Takashige Aono, Yuma Shirai, Tomohiko Nishida, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 6 )   2016.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.55.06GH09

    Web of Science

    researchmap

  • Oxidation of CuSn alloy nanotree and application for gas sensors

    Naoto Kaneko, Tomohiro Shimizu, Yoshihiro Tada, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 6 )   2016.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.55.06GH08

    Web of Science

    researchmap

  • Formation of three-dimensional nano-trees with perpendicular branches by electrodeposition of CuSn alloy

    Tomohiro Shimizu, Yoshihiro Tada, Naoto Kaneko, Shukichi Tanaka, Shoso Shingubara

    SURFACE & COATINGS TECHNOLOGY   294   83 - 89   2016.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.surfcoat.2016.03.046

    Web of Science

    researchmap

  • Polarized hard X-ray photoemission system with micro-positioning technique for probing ground-state symmetry of strongly correlated materials

    Hidenori Fujiwara, Sho Naimen, Atsushi Higashiya, Yuina Kanai, Hiroshi Yomosa, Kohei Yamagami, Takayuki Kiss, Toshiharu Kadono, Shin Imada, Atsushi Yamasaki, Kouichi Takase, Shintaro Otsuka, Tomohiro Shimizu, Shoso Shingubara, Shigemasa Suga, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Akira Sekiyama

    JOURNAL OF SYNCHROTRON RADIATION   23   735 - 742   2016.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1107/S1600577516003003

    Web of Science

    researchmap

  • Band gap tuning of Ni1-x MgxO films by radio-frequency sputter deposition for deep-ultraviolet photodetectors (vol 8, 105801, 2015)

    Hiroki Nishitani, Kohei Ohta, Sosuke Kitano, Ryosuke Hamano, Mitsuru Inada, Tomohiro Shimizu, Shoso Shingubara, Hiromitsu Kozuka, Tadashi Saitoh

    APPLIED PHYSICS EXPRESS   9 ( 3 )   2016.3

     More details

  • Fabrication of nanocone arrays by two step metal assisted chemical etching method

    Tomohiro Shimizu, Norihiro Tanaka, Yoshihiro Tada, Yasuhiro Hara, Noriaki Nakamura, Junichi Taniuchi, Koichi Takase, Takeshi Ito, Shoso Shingubara

    MICROELECTRONIC ENGINEERING   153   55 - 59   2016.3

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mee.2016.01.030

    Web of Science

    researchmap

  • Nitridation of silicon by nitrogen neutral beam

    Yasuhiro Hara, Tomohiro Shimizu, Shoso Shingubara

    APPLIED SURFACE SCIENCE   363   555 - 559   2016.2

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.apsusc.2015.11.096

    Web of Science

    researchmap

  • Fabricating a QCM device with the nanostructures using the AAO template

    N. Asai, T. Ito, T. Shimizu, S. Shingubara

    CHEMICAL SENSORS 12: CHEMICAL AND BIOLOGICAL SENSORS AND ANALYTICAL SYSTEMS   75 ( 16 )   229 - 232   2016

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/07516.0229ecst

    Web of Science

    researchmap

  • Antibacterial characteristics of Si nano-pillar array Reviewed

    Takeshi Ito, Kazuki Nakade, Naoto Asai, Tomohiro Shimizu, Shoso Shingubara

    2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)   82 - 84   2016

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Electrodeposited ZnO thin film on twin sensor QCM for sensing of ethanol at room temperature

    Takeshi Ito, Yudai Fujii, Noriyoshi Yamanishi, Naoto Asai, Tomohiro Shimizu, Shoso Shingubara

    PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016   168   411 - 414   2016

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1016/j.proeng.2016.11.192

    Web of Science

    researchmap

  • Magnetic conductive filament formed in the ReRAM device with ferromagnetic electrode

    Hayaco Yoshida, Tomohiro Shimizu, Takeshi Ito, Shoso Shingubara

    ECS Transactions   75 ( 32 )   65 - 71   2016

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Electrochemical Society Inc.  

    DOI: 10.1149/07532.0065ecst

    Scopus

    researchmap

  • Band gap tuning of Ni1-xMgxO films by radio-frequency sputter deposition for deep-ultraviolet photodetectors

    Hiroki Nishitani, Kohei Ohta, Sosuke Kitano, Ryosuke Hamano, Mitsuru Inada, Tomohiro Shimizu, Shoso Shingubara, Hiromitsu Kozuka, Tadashi Saitoh

    Applied Physics Express   8 ( 10 )   2015.10

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Japan Society of Applied Physics  

    DOI: 10.7567/APEX.8.105801

    Scopus

    researchmap

  • Nitridation of Si surface at the bottom of submicron trench using nitrogen neutral beam

    Yasuhiro Hara, Tomohiro Shimizu, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 6 )   2015.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.54.06FH07

    Web of Science

    researchmap

  • Suppression of switching voltage variation by controlling filament formation in In/porous alumina/Al resistive change random access memory

    Yusuke Tanimoto, Shintaro Otsuka, Tomohiro Shimizu, Shoso Shingubara, Kouichi Takase

    JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 6 )   2015.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.54.06FH05

    Web of Science

    researchmap

  • Magnetoresistance of conductive filament in Ni/HfO2/Pt resistive switching memory

    Shintaro Otsuka, Yoshifumi Hamada, Daisuke Ito, Tomohiro Shimizu, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 5 )   2015.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.54.05ED02

    Web of Science

    researchmap

  • Dynamic moderation of an electric field using a SiO2 switching layer in TaOx-based ReRAM

    Qi Wang, Yaomi Itoh, Tohru Tsuruoka, Shintaro Ohtsuka, Tomohiro Shimizu, Shoso Shingubara, Tsuyoshi Hasegawa, Masakazu Aono

    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS   9 ( 3 )   166 - 170   2015.3

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1002/pssr.201409531

    Web of Science

    researchmap

  • Controlling I-V Characteristics of Resistive Change Memory (ReRAM) Using Nano-peak Structures Reviewed

    Kouichi Takase, Yusuke Tanimoto, Shintaro Otsuka, Tomohiro Shimizu, Shoso Shinguhara

    INTERNATIONAL CONFERENCE ON ENERGY, ENVIRONMENT AND CHEMICAL ENGINEERING (ICEECE 2015)   202 - 207   2015

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Stability evaluation of non-agglomerated Pd nanoparticle catalyst dispersion for electroless deposition

    Noriaki Nakamura, Junichi Taniuchi, Takayuki Sone, Kotoe Sasaki, Fumihiro Inoue, Tomohiro Shimzu, Shoso Shingubara

    ECS Transactions   64 ( 40 )   77 - 84   2015

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Electrochemical Society Inc.  

    DOI: 10.1149/06440.0077ecst

    Scopus

    researchmap

  • Cu displacement plating on electroless plated CoWB layer on SiO&lt;inf&gt;2&lt;/inf&gt; and its adhesion property

    Kohei Ohta, Fumihiro Inoue, Tomohiro Shimizu, Shoso Shingubara

    ECS Transactions   64 ( 40 )   57 - 61   2015

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Electrochemical Society Inc.  

    DOI: 10.1149/06440.0057ecst

    Scopus

    researchmap

  • Diffusion suppression in vapor-liquid-solid Si nanowire growth by a barrier layer between the Au catalyst and substrate

    Makoto Koto, Masatoshi Watanabe, Etsuko Sugawa, Tomohiro Shimizu, Shoso Shingubara

    JOURNAL OF CRYSTAL GROWTH   404   192 - 198   2014.10

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.jcrysgro.2014.07.023

    Web of Science

    researchmap

  • Effect of electric field concentration using nanopeak structures on the current-voltage characteristics of resistive switching memory

    Shintaro Otsuka, Tomohiro Shimizu, Shoso Shingubara, Katsunori Makihara, Seiichi Miyazaki, Atsushi Yamasaki, Yusuke Tanimoto, Kouichi Takase

    AIP ADVANCES   4 ( 8 )   2014.8

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.4892823

    Web of Science

    researchmap

  • Morphology dependence of optical reflectance properties for a high-density array of silicon nanowires

    Takuya Yamaguchi, Tomohiro Shimizu, Yasuhiro Morosawa, Koichi Takase, Tzu-Ling Chen, Shin-Ming Lu, Hui-Ching Chien, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 6 )   2014.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.53.06JF10

    Web of Science

    researchmap

  • Effect of confining filaments on the current-voltage characteristics of resistive change memory by using anodic porous alumina

    Yusuke Tanimoto, Shintaro Otsuka, Tomohiro Shimizu, Shoso Shingubara, Tadataka Watanabe, Yoshiki Takano, Kouichi Takase

    JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 6 )   2014.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.53.06JF07

    Web of Science

    researchmap

  • Temperature dependence of resistance of conductive nanofilament formed in Ni/NiOx/Pt resistive switching random access memory

    Shintaro Otsuka, Yoshihumi Hamada, Tomohiro Shimizu, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 5 )   2014.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.53.05GD01

    Web of Science

    researchmap

  • Fabrication of vrtical Cu2ZnSnS4 nnowire arrays by two-step electroplating method into anodic aluminum oxide template”, J. Mater. Reviewed

    WANG C, TANAKA S, SHIMIZU T, SHINGUBARA S

    Sci. & Nanotech   1,1-4   2014

     More details

  • Fabrication of ordered arrays of anodic aluminum oxide pores with interpore distance smaller than the pitch of nano-pits formed by ion beam etching Reviewed

    WANG C, TANAKA S, SAITO K, SHIMIZU T, SHINGUBARA S

    J. Mater. Sci. & Nanotech.   1, 1-5   2014

     More details

  • Improvement of adhesion strength of electroless barrier layer and its application to TSV process

    Shoichiro Nishizawa, Fumihiro Inoue, Tomohiro Shimizu, Shoso Shingubara

    PROCESSING, MATERIALS, AND INTEGRATION OF DAMASCENE AND 3D INTERCONNECTS 5   58 ( 17 )   59 - 65   2014

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/05817.0059ecst

    Web of Science

    researchmap

  • Ferromagnetic nano-conductive filament formed in Ni/TiO2/Pt resistive-switching memory

    Shintaro Otsuka, Yoshifumi Hamada, Tomohiro Shimizu, Shoso Shingubara

    Applied Physics A: Materials Science and Processing   118 ( 2 )   613 - 619   2014

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Springer Verlag  

    DOI: 10.1007/s00339-014-8769-5

    Scopus

    researchmap

  • Anisotropic magnetoresistance of ferromagnetic conductive filament in resistive switching memory

    S. Otsuka, Y. Hamada, T. Shimizu, S. Shingubara

    NONVOLATILE MEMORIES 3   64 ( 14 )   27 - 33   2014

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/06414.0029ecst

    Web of Science

    researchmap

  • Study on oxide thickness dependence of current-voltage characteristics for HfOx based ReRAM device

    Y. Hamada, S. Otsuka, T. Shimizu, S. Shingubara

    NONVOLATILE MEMORIES 3   64 ( 14 )   91 - 96   2014

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/06414.0093ecst

    Web of Science

    researchmap

  • Temperature Dependence of Resistance of Conductive Filament Formed by Dielectric Breakdown

    Shintaro Otsuka, Takashi Kato, Takuya Kyomi, Yoshifumi Hamada, Yoshihiro Tada, Tomohiro Shimizu, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 6 )   2013.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.52.06GF04

    Web of Science

    researchmap

  • Control of Crystal Orientation and Diameter of Silicon Nanowire Using Anodic Aluminum Oxide Template

    Tomohiro Shimizu, Fumihiro Inoue, Chonge Wang, Shintaro Otsuka, Yoshihiro Tada, Makoto Koto, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 6 )   2013.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.52.06GF06

    Web of Science

    researchmap

  • Improvement of the Reproducibility of the Switching Voltage of Resistance Change Random Access Memory by Restricting Formation of Conductive Filaments

    Saeko Furuya, Shintaro Otsuka, Tomohiro Shimizu, Shouso Shingubara, Tadataka Watanabe, Yoshiki Takano, Kouichi Takase

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 6 )   2013.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.52.06GF07

    Web of Science

    researchmap

  • Highly adhesive electroless barrier/Cu-seed formation for high aspect ratio through-Si vias

    Fumihiro Inoue, Tomohiro Shimizu, Hiroshi Miyake, Ryohei Arima, Toshihiko Ito, Hirofumi Seki, Yuko Shinozaki, Tomohiko Yamamoto, Shoso Shingubara

    MICROELECTRONIC ENGINEERING   106   164 - 167   2013.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mee.2013.01.009

    Web of Science

    researchmap

  • Improved control of silicon nanowire growth by the vapor-liquid-solid method using a diffusion barrier layer between catalyst and substrate

    Makoto Koto, Tomohiro Shimizu, Shoso Shingubara

    JOURNAL OF CRYSTAL GROWTH   369   1 - 7   2013.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.jcrysgro.2012.12.140

    Web of Science

    researchmap

  • Electric Conduction Mechanism of Resistive Switching Memory Fabricated with Anodic Aluminum Oxide

    S. Otsuka, T. Shimizu, S. Shingubara, N. Iwata, T. Watanabe, Y. Takano, K. Takase

    NONVOLATILE MEMORIES   50 ( 34 )   49 - 54   2013

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/05034.0049ecst

    Web of Science

    researchmap

  • Control of Adhesion Strength and TSV Filling Morphology of Electroless Barrier Layer

    R. Arima, F. Inoue, H. Miyake, T. Shimizu, S. Shingubara

    PROCESSING MATERIALS OF 3D INTERCONNECTS, DAMASCENE AND ELECTRONICS PACKAGING 4   50 ( 32 )   13 - 18   2013

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/05032.0013ecst

    Web of Science

    researchmap

  • Temperature Dependence of Resistance in Conductive Filament Formed with Dielectric Breakdown of Ni/TiO2/Pt structure

    S. Otsuka, Y. Hamada, T. Shimizu, S. Shingubara

    NONVOLATILE MEMORIES 2   58 ( 5 )   27 - 31   2013

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/05805.0027ecst

    Web of Science

    researchmap

  • Adsorption of Pd nanoparticles catalyst in high aspect ratio through-Si vias for electroless deposition

    Fumihiro Inoue, Tomohiro Shimizu, Hiroshi Miyake, Ryohei Arima, Toshihiko Ito, Hirofumi Seki, Yuko Shinozaki, Tomohiko Yamamoto, Shoso Shingubara

    ELECTROCHIMICA ACTA   82   372 - 377   2012.11

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.electacta.2012.04.165

    Web of Science

    researchmap

  • Origin of visible photoluminescence from arrays of vertically arranged Si-nanopillars decorated with Si-nanocrystals

    A. S. Kuznetsov, T. Shimizu, S. N. Kuznetsov, A. V. Klekachev, S. Shingubara, J. Vanacken, V. V. Moshchalkov

    NANOTECHNOLOGY   23 ( 47 )   2012.11

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/0957-4484/23/47/475709

    Web of Science

    researchmap

  • AgNO3-Dependent Morphological Change of Si Nanostructures Prepared by Single-Step Metal Assisted Etching Method

    Tomohiro Shimizu, Takuya Yamaguchi, Fumihiro Inoue, Mitsuru Inada, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 11 )   2012.11

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.51.11PE02

    Web of Science

    researchmap

  • Resistive switching characteristics of NiO/Ni nanostructure

    Shintaro Otsuka, Saeko Furuya, Ryota Takeda, Tomohiro Shimizu, Shoso Shingubara, Tadataka Watanabe, Yoshiki Takano, Kouichi Takase

    MICROELECTRONIC ENGINEERING   98   367 - 370   2012.10

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mee.2012.07.035

    Web of Science

    researchmap

  • Fabrication of an array of Ni/NiO nanowire-ReRAM using AAO template on Si

    Tomohiro Shimizu, Yuzuru Sumita, Fumihiro Inoue, Tetsuji Minokuchi, Shoso Shingubara, Shintaro Otsuka, Koichi Takase

    e-Journal of Surface Science and Nanotechnology   10   476 - 479   2012.9

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1380/ejssnt.2012.476

    Scopus

    researchmap

  • Additional Electrochemical Treatment Effects on the Switching Characteristics of Anodic Porous Alumina Resistive Switching Memory

    Shintaro Otsuka, Ryouta Takeda, Saeko Furuya, Tomohiro Shimizu, Shouso Shingubara, Nobuyuki Iwata, Tadataka Watanabe, Yoshiki Takano, Kouichi Takase

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 6 )   2012.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.51.06FF11

    Web of Science

    researchmap

  • Evaluation of morphology and crystal structure of Si nanowires prepared by singlestep metal assisted etching

    Takuya Yamaguchi, Tomohiro Shimizu, Fumihiro Inoue, Chounge Wang, Mitsuru Inada, Tadashi Saitoh, Shoso Shingubara

    IMFEDK 2012 - 2012 International Meeting for Future of Electron Devices, Kansai   1439. AA03-02   84 - 85   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IMFEDK.2012.6218593

    Scopus

    researchmap

  • All-wet Cu-filled TSV Process Using Electroless Co-alloy Barrier and Cu Seed

    Fumihiro Inoue, Tomohiro Shimizu, Hiroshi Miyake, Ryohei Arima, Shoso Shingubara, Kansai University

    2012 IEEE 62ND ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC)   810 - 815   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Fabrication of an ordered anodic aluminum oxide pore arrays with an interpore distance smaller than the nano-indentation pitch formed by ion beam etching

    Chonge Wang, Yasuharu Ishida, Ken-Ichi Saitoh, Tomohiro Shimizu, Shoso Shingubara, Shukichi Tanaka

    IMFEDK 2012 - 2012 International Meeting for Future of Electron Devices, Kansai   1, 1-5   122 - 123   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IMFEDK.2012.6218612

    Scopus

    researchmap

  • Cu2ZnSnS4 thin films and nanowires prepared by different single-step electrodeposition method in quaternary electrolyte

    Minsung Jeon, Tomohiro Shimizu, Shoso Shingubara

    MATERIALS LETTERS   65 ( 15-16 )   2364 - 2367   2011.8

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.matlet.2011.05.003

    Web of Science

    researchmap

  • Formation of electroless barrier and seed layers in a high aspect ratio through-Si vias using Au nanoparticle catalyst for all-wet Cu filling technology

    Fumihiro Inoue, Tomohiro Shimizu, Takumi Yokoyama, Hiroshi Miyake, Kazuo Kondo, Takeyasu Saito, Taro Hayashi, Shukichi Tanaka, Toshifumi Terui, Shoso Shingubara

    ELECTROCHIMICA ACTA   56 ( 17 )   6245 - 6250   2011.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.electacta.2011.02.078

    Web of Science

    researchmap

  • Preparation of Ultrahigh-Density Magnetic Nanowire Arrays beyond 1 Terabit/Inch(2) on Si Substrate Using Anodic Aluminum Oxide Template

    Tomohiro Shimizu, Kazumo Aoki, Yoshinori Tanaka, Toshifumi Terui, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 )   2011.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.50.06GE01

    Web of Science

    researchmap

  • Large Magnetoresistance Switching Phenomena in Nanoconduction Path Formed with Dielectric Breakdown of SiO2 Multilayered with Ferromagnetic Film

    Yuichi Shiotani, Kohei Shimomura, Tomohiro Shimizu, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 )   2011.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.50.06GG15

    Web of Science

    researchmap

  • Formation and Evaluation of Electroless-Plated Barrier Films for High-Aspect-Ratio Through-Si Vias

    Hiroshi Miyake, Fumihiro Inoue, Takumi Yokoyama, Tomohiro Shimizu, Shukichi Tanaka, Toshifumi Terui, Shoso Shingubara

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 5 )   2011.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.50.05ED01

    Web of Science

    researchmap

  • Low temperature through-Si via fabrication using electroless deposition

    Fumihiro Inoue, Harold Philipsen, Alex Radisic, Silvia Armini, Peter Leunissen, Hiroshi Miyake, Ryohei Arima, Tomohiro Shimizu, Toshiaki Ito, Hirofumi Seki, Yuko Shinozaki, Tomohiko Yamamoto, Shoso Shingubara

    2011 IEEE International 3D Systems Integration Conference, 3DIC 2011   2011

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/3DIC.2012.6262984

    Scopus

    researchmap

  • Control of crystal orientation of epitaxial Si nanowires on Si substrate using AAO template

    Tomohiro Shimizu, Qi Wang, Chonge Wang, Fumihiro Inoue, Makoto Koto, Minsung Jeon, Shoso Shingubara

    Materials Research Society Symposium Proceedings   1350   59 - 62   2011

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1557/opl.2011.1131

    Scopus

    researchmap

  • Oxidation Rate Effect on the Direction of Metal-Assisted Chemical and Electrochemical Etching of Silicon

    Zhipeng Huang, Tomohiro Shimizu, Stephan Senz, Zhang Zhang, Nadine Geyer, Ulrich Goesele

    JOURNAL OF PHYSICAL CHEMISTRY C   114 ( 24 )   10683 - 10690   2010.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1021/jp911121q

    Web of Science

    researchmap

  • Synthesis of silicon nanotubes with cobalt silicide ends using anodized aluminum oxide template

    Zhang Zhang, Lifeng Liu, Tomohiro Shimizu, Stephan Senz, Ulrich Goesele

    NANOTECHNOLOGY   21 ( 5 )   2010.2

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/0957-4484/21/5/055603

    Web of Science

    researchmap

  • Conformal electroless deposition of barrier and Cu seed layers for realizing all-wet TSV filling process

    S. Shingubara, F. Inoue, T. Yokoyama, H. Miyake, T. Shimizu, T. Terui, S. Tanaka, K. Kondo

    ECS Transactions   33 ( 36 )   23 - 27   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Electrochemical Society Inc.  

    DOI: 10.1149/1.3575438

    Scopus

    researchmap

  • Bottom-Imprint Method for VSS Growth of Epitaxial Silicon Nanowire Arrays with an Aluminium Catalyst

    Zhang Zhang, Tomohiro Shimizu, Lijun Chen, Stephan Senz, Ulrich Goesele

    ADVANCED MATERIALS   21 ( 46 )   4701 - +   2009.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1002/adma.200900995

    Web of Science

    researchmap

  • Ordered Arrays of Vertically Aligned [110] Silicon Nanowires by Suppressing the Crystallographically Preferred Etching Directions

    Zhipeng Huang, Tomohiro Shimizu, Stephan Senz, Zhang Zhang, Xuanxiong Zhang, Woo Lee, Nadine Geyer, Ulrich Goesele

    NANO LETTERS   9 ( 7 )   2519 - 2525   2009.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1021/nl803558n

    Web of Science

    researchmap

  • Ordered High-Density Si [100] Nanowire Arrays Epitaxially Grown by Bottom Imprint Method

    Zhang Zhang, Tomohiro Shimizu, Stephan Senz, Ulrich Goesele

    ADVANCED MATERIALS   21 ( 27 )   2824 - +   2009.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1002/adma.200802156

    Web of Science

    researchmap

  • Vertical Epitaxial Wire-on-Wire Growth of Ge/Si on Si(100) Substrate

    Tomohiro Shimizu, Zhang Zhang, Shoso Shingubara, Stephan Senz, Ulrich Goesele

    NANO LETTERS   9 ( 4 )   1523 - 1526   2009.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1021/nl8035756

    Web of Science

    researchmap

  • Extended arrays of vertically aligned sub-10 nm diameter [100] Si nanowires by metal-assisted chemical etching

    Zhipeng Huang, Xuanxiong Zhang, Manfred Reiche, Lifeng Liu, Woo Lee, Tomohiro Shimizu, Stephan Senz, Ulrich Goesele

    NANO LETTERS   8 ( 9 )   3046 - 3051   2008.9

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1021/nl802324y

    Web of Science

    researchmap

  • Synthesis of epitaxial Si(100) nanowires on Si(100) substrate using vapor-liquid-solid growth in anodic aluminum oxide nanopore arrays

    T. Shimizu, S. Senz, S. Shingubara, U. Goesele

    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING   87 ( 4 )   607 - 610   2007.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1007/s00339-007-3984-y

    Web of Science

    researchmap

  • Synthesis of vertical high-density epitaxial Si(100) nanowire arrays on a Si(100) substrate using an anodic aluminum oxide template

    Tomohiro Shimizu, Tian Xie, Jo Nishikawa, Shoso Shingubara, Stephan Senz, Ulrich Goesele

    ADVANCED MATERIALS   19 ( 7 )   917 - +   2007.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1002/adma.200700153

    Web of Science

    researchmap

  • Homoepitaxial growth of vertical Si nanowires on Si (100) substrate using Anodic Aluminum Oxide template Reviewed

    SHIMIZU Tomohiro, XIE T, SCHMIDT V, NISHIKAWA Jo, SHINGUBARA Shoso, SENZ S, GOESELE U

    Materials Research Society   1058E, JJ03-01   2007

     More details

  • Epitaxial growth of Cu nanodot arrays using an AAO template on a Si substrate

    T Shimizu, M Nagayanagi, T Ishida, O Sakata, T Oku, H Sakaue, T Takahagi, S Shingubara

    ELECTROCHEMICAL AND SOLID STATE LETTERS   9 ( 4 )   J13 - J16   2006

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1149/1.2176891

    Web of Science

    researchmap

  • Fabrication of carbon nanotube and nanorod arrays using nanoporous templates

    SJ Huang, T Shimizu, H Sakaue, S Shingubara, T Takahagi

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   44 ( 7A )   5289 - 5291   2005.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.44.5289

    Web of Science

    researchmap

  • Magnetic properties of wide gap layered semiconductor (La(1-x)M(x)o) Cu1-yTyS (M = Ca, Ce; T = Mn, Co, Zn) Reviewed

    K. Takase, O. Shoji, T. Shimizu, Y. Takahashi, Y. Takano, K. Sekizawa

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   272   E1535 - E1536   2004.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.jmmm.2003.12.798

    Web of Science

    researchmap

  • Aspect ratio dependence of hysteresis property of high density Co wire array buried in porous alumina template

    S Shingubara, K Morimoto, M Nagayanagi, T Shimizu, O Yaegashi, GR Wu, H Sakaue, T Takahagi, K Takase

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   272   1598 - 1599   2004.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.jmmm.2003.12.320

    Web of Science

    researchmap

  • Growth of cobalt nano column arrays directly on Si(111) substrate using AAO template

    T. Shimizu, M. Nagayanagi, T. Hao, H. Sakaue, T. Takahagi, S. Shingubara

    Digest of Papers - Microprocesses and Nanotechnology 2004   298 - 299   2004

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:The Japan Society of Applied Physics  

    DOI: 10.1109/imnc.2004.245661

    Scopus

    researchmap

  • Formation of Ultra-High-Density Ferromagnetic Column Arrays Beyond 1 Tera/inch^2 Using Porous Alumina Template Reviewed

    SHIMIZU Tomohiro, NAGAYANAGI Mamoru, FUJII Youichi, YAEGASHI Osamu, WU Guang Ri, SAKAUE Hiroyuki, TAKAHAGI Takayuki, SAKATA Osami, KUSAKA Kazuya, SHINGUBARA Shoso

    Journal of the Magnetics Society of Japan   4, 231-234 ( 4 )   231 - 234   2004

     More details

    Language:English   Publisher:The Magnetics Society of Japan (MSJ)  

    The formation of ultra-high-density ferromagnetic column arrays beyond 1 Tera/inch<SUP>2</SUP> was investigatedusing porous alumina films formed on Si substrate. It was empirically known that a pitch of nanohole array shrunk with a reduction of anodic voltage. We carried out anodic oxidation of sputtered Al film at the anodic voltage below 10V, and found that the density of the nanohole arraysincreased significantly with a reduction of the anodic voltage.and reached 1.5 Tera/inch<SUP>2</SUP> when the anodic voltage was 5.0 V. We also succeeded in the electro-plating of Co column array in these fine holes.The Co column arrays formed by electroplating in the nanoholes were polycrystalline. and showed perpendicular magnetic anisotropy when their aspect ratio was larger than 3. The coercive field of Co columns tended to increase with a reduction of the hole diameter, which was confirmed by micromagnetic simulation based on the LLG equations. These results strongly suggest that ferromagnetic nano column arrays buried in porous alumina film on substrate have a high potential for application to a future ultra-high density magnetic recording media.

    DOI: 10.3379/tmjpn2001.4.231

    CiNii Books

    researchmap

  • Electronic structure of oxysulfide (LaO)CuS and (La1-xCaxO)Cu1-xNixS (x &lt;= 0.10) studied by photoemission and inverse-photoemission spectroscopies

    H Sato, H Negishi, A Wada, A Ino, S Negishi, C Hirai, H Namatame, M Taniguchi, K Takase, Y Takahashi, T Shimizu, Y Takano, K Sekizawa

    PHYSICAL REVIEW B   68 ( 3 )   2003.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1103/PhysRevB.68.035112

    Web of Science

    researchmap

  • Structural defects effect on ferromagnetism of layered oxysulfide (La1-xCaxO)Cu1-xNixS Reviewed

    K Takase, T Shimizu, K Makihara, Y Takahashi, Y Takano, K Sekizawa, Y Kuroiwa, S Aoyagi, A Utsumi

    PHYSICA B-CONDENSED MATTER   329   961 - 962   2003.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/S0921-4526(02)02623-6

    Web of Science

    researchmap

  • Static and dynamic transport study of beta-FeSi2 single crystals

    Y Hara, K Takase, T Shimizu, A Ohnishi, M Sasaki

    PHYSICA B-CONDENSED MATTER   329   1113 - 1114   2003.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/S0921-4526(02)02462-6

    Web of Science

    researchmap

  • Electrical resistivity and photoemission spectra of layered oxysulfide (La1-xCaxO)Cu1-xNixS Reviewed

    TAKASE Koichi, SHIMIZU Tomohiro, MAKIHARA K, SATO H, NEGISHI H, TAKAHASHI Y, TAKANO Y, SEKIZAWA K, KUROIWA Y, AOYAGI S, UTSUMI A, WADA A, INO A, NAMETAKE H, TANIGUCHI M

    Physica B   329-333, 898-899   2003

     More details

  • Electrical resistivity and photoluminescence spectrum of layered oxysulfide (LaO) CuS Reviewed

    TAKAHASHI

    Solid State Communications   123, 531-534   531 - 534   2002

     More details

▼display all

MISC

  • Formation of Cu displacement plated film on electroless CoWB layer and its adhesion property

    24   387 - 390   2014.9

     More details

    Language:Japanese  

    researchmap

  • Electrical resistivity and photoemission spectra of layered oxysulfide (La1-xCaxO)Cu1-xNixS

    K Takase, T Shimizu, K Makihara, H Sato, H Negishi, Y Takahashi, Y Takano, K Sekizawa, Y Kuroiwa, S Aoyagi, A Utsumi, A Wada, A Ino, H Namatame, M Taniguchi

    PHYSICA B-CONDENSED MATTER   329   898 - 899   2003.5

     More details

  • Fabrication of ultra high density ferromagnetic column arrays by porous alumina template for magnetic recording media

    T. Shimizu, K. Morimoto, M. Nagayanagi, Y. Fujii, O. Yaegashi, G. R. Wu, H. Sakaue, T. Takahagi, S. Shingubara

    Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003   62 - 63   2003

     More details

    Language:English   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/IMNC.2003.1268519

    Scopus

    researchmap

Presentations

  • Formation and evaluation of Cu2ZnSnS4 films prepared by electroplating and sulfurization with CS2

    NISHIDA T, SHIMIZU T, TAKASE K, TANAKA S, ITO T, SHINGUBARA S

    2016.11 

     More details

    Event date: 2016.11

    Venue:Singapore  

    researchmap

  • Nano-porous Lattice Biosensor Using Anodic Aluminum Oxide Substrate

    Matsuda Y, ASAI N, SHIMIZU T, SHINGUBARA S, ITO T

    2016.11 

     More details

    Event date: 2016.11

    Venue:Kyoto  

    researchmap

  • Sensitized Mass Change Detection by Using Au Nanoporous Electrode for Biosensing

    TERASAWA H, ASAI N, SHIMIZU T, SHINGUBARA S, ITO T

    2016.11 

     More details

    Event date: 2016.11

    Venue:Kyoto  

    researchmap

  • Magnetic conductive filament formed in the ReRAM device with ferromagnetic electrode

    YOSHYIDA H, SHIMIZU T, ITO T, SHINGUBARA S

    2016.10 

     More details

    Event date: 2016.10

    Venue:Hawaii, USA  

    researchmap

  • Antibacterial Property of Si Nanopillar Array Fabricated Using Metal Assisted Etching; Mimic a Cicada Wing

    ITO T, NAKADE K, ASAI N, SHIMIZU T, SHINGUBARA S

    2016.10 

     More details

    Event date: 2016.10

    Venue:Hawaii, USA  

    researchmap

  • Fabricating a QCM Device with the Nanostructures Using the AAO Template

    ASAI N, ITO T, SHIMIZU T, SHINGUBARA S

    2016.10 

     More details

    Event date: 2016.10

    Venue:Hawaii, USA  

    researchmap

  • Electroless plating of diffusion barrier films on SiO2 and evaluation of film characteristics

    HIRATE A, MIYACHI Y, OHTA K, SHIMIZU T, ITO T, SHINGUBARA S

    2016.10 

     More details

    Event date: 2016.10

    Venue:Hawaii, USA  

    researchmap

  • Oxidation of CuSn alloy nano-tree and application for gas sensors

    KANEKO N, SHIMIZU T, ITO T, TADA Y, SHINGUBARA S

    2016.10 

     More details

    Event date: 2016.10

    Venue:Hawaii, USA  

    researchmap

  • Electrodeposited ZnO thin film on twin sensor QCM for sensing of ethanol at room temperature

    ITO T, FUJII Y, YMANISHI N, SHIMIZU T, SHINGUBARA S

    2016.9 

     More details

    Event date: 2016.9

    Venue:Hungary  

    researchmap

  • Antibacterial characteristics of Si nano-pillar array

    ITO T, NAKADE K, ASAI N, SHIMIZU T, SHINGUBARA S

    2016.9 

     More details

    Event date: 2016.9

    Venue:Sendai, Japan  

    researchmap

  • Formation of Si moth-eye structures using 2-step metal assisted chemical etching

    SHIMIZU T, TAKASE K, ITO T, SHINGUBARA S

    2016.7 

     More details

    Event date: 2016.7

    Venue:Tessalonik, Greece  

    researchmap

  • Fabrication of Vertical Cu2ZnSnS4/Mo/Si Nanocylinder Arrays Using a Patterned Si Nanowire Arrays Template

    WANG C, SHIMIZU T, SHINGUBARA S

    2016.6 

     More details

    Event date: 2016.6

    Venue:Munich, Germany  

    researchmap

  • Opto-electronic properties of Cu2ZnSnS4 films prepared using electroplating and CS2 sulfurization process

    SHIMIZU T, NISHIDA K, NISHIDA T, TAKASE K, WANG C, TANAKA S, SHINGUBARA S

    2016.6 

     More details

    Event date: 2016.6

    Venue:Munich, Germany  

    researchmap

  • Highly adhesive displacement plated Cu seed on CoWB barrier for all-wet TSV fill process

    SHINGUBARA S, OHTA K, INOUE F, ITO T, SHIMIZU T

    2016.3 

     More details

    Event date: 2016.3

    Venue:Brussels, Belgium  

    researchmap

  • Non-enzymatic detection of glucose using BaCuO2 thin layer

    ITO T, ASADA T, ASAI N, SHIMIZU T, SHINGUBARA S

    2016.3 

     More details

    Event date: 2016.3

    Venue:Nagoya, Japan  

    researchmap

  • Fabrication and optical property of metal nanowire arrays embedded in anodic porous alumina membrane

    TAKASE K, SHIMIZU T, SUGAWA K, SHINGUBARA S

    2015.11 

     More details

    Event date: 2015.11

    Venue:Toyama, Japan  

    researchmap

  • Switching and Magnetoresistance Characteristics Observed in the ReRAM Device with Ferromagnetic Electrodes

    YOSHYIDA H, ITO D, SHIMIZU T, ITO T, SHINGUBARA S

    2015.11 

     More details

    Event date: 2015.11

    Venue:Toyama, Japan  

    researchmap

  • Oxidation of CuSn alloy nanotree and application for gas sensors

    KANEKO N, SHIMIZU T, TADA Y, ITO T, SHINGUBARA S

    2015.11 

     More details

    Event date: 2015.11

    Venue:Toyama, Japan  

    researchmap

  • Highly adhesive displacement plated Cu seed layer for all-wet TSV fill process

    OHTA K, INOUE F, SHIMIZU T, SHINGUBARA S

    2015.10 

     More details

    Event date: 2015.10

    Venue:Phonenics, USA  

    researchmap

  • Resistance switching phenomenon associated with anisotropic magnetoresistance ofthe ReRAM device with ferromagnetic electrodes

    ITO D, YOSHIDA H, SHIMIZU T, SHINGUBARA S

    2015.10 

     More details

    Event date: 2015.10

    Venue:Phonenics, USA  

    researchmap

  • Fabrication of nanocone arrays by two step metal assisted chemical etching method

    TANAKA N, SHIMIZU T, TADA Y, HARA Y, NAKAMURA N, TANIUCHI J, TAKASE K, ITO T, SHINGUBARA S

    2015.9 

     More details

    Event date: 2015.9

    Venue:Hague, Netherlands  

    researchmap

  • All-wet TSV filling with highly adhesive displacement plated Cu seed layer

    INOUE F, SHIMIZU T, SHINGUBARA S

    2015.9 

     More details

    Event date: 2015.9

    Venue:Sendai, Japan  

    researchmap

  • Temperature dependence of magnetoresistance characteristics of the on-state of resistive random access memory with ferromagnetic electrode

    HAMADA Y, OTSUKA S, SHIMIZU T, SHINGUBARA S

    2015.6 

     More details

    Event date: 2015.6

    Venue:Kyoto, Japan  

    researchmap

  • Effect of additive on the formation of CuSn Alloynano-trees formed with DC Electroplating

    SHIMIZU T, KANEKO N, TADA Y

    2015.5 

     More details

    Event date: 2015.5

    Venue:Chicago, USA  

    researchmap

  • CuSn合金ナノツリー構造体の電解めっき形成と評価

    夛田 芳広, 新宮原 正三, 清水 智弘, 岡 演之

    2014年電気化学会第81回大会  2014.3 

     More details

    Event date: 2014.3

    Venue:大阪  

    researchmap

  • Temperature Dependence of Resistance of Conductive Nano-filament Formed in Resistance Change Memory

    OTSUKA S, HAMADA Y, SHIMIZU T, SHINGUBARA S

    第61回応用物理学会春季学術講演会  2014.3 

     More details

    Event date: 2014.3

    Venue:神奈川  

    researchmap

  • 凝集構造を利用したSi ナノワイヤ配列の光学特性制御

    山口 卓也, 清水 智弘, 新宮原 正三

    第61回応用物理学会春季学術講演会  2014.3 

     More details

    Event date: 2014.3

    Venue:神奈川  

    researchmap

  • 自己集合ポリスチレン球とメタルアシストエッチングを用いた規則配列Siナノワイヤ作製と光学特性評価

    近藤 彰人, 山口 卓也, 王 崇娥, 原 康寛, 清水 智弘, 新宮原 正三

    2014年電気化学会第81回大会  2014.3 

     More details

    Event date: 2014.3

    Venue:大阪  

    researchmap

  • 窒素中性粒子ビームによるSi表面の窒化

    原 安寛, 清水 智弘, 新宮原 正三

    第61回応用物理学会春季学術講演会  2014.3 

     More details

    Event date: 2014.3

    Venue:神奈川  

    researchmap

  • Enhancement of light absorption using bunched Si nanowire arrays

    YAMAGUCHI T, SHIMIZU T, MOROSAWA Y, TAKASE K, SHINGUBARA S

    Material Research Society fall meeting 2013  2013.11 

     More details

    Event date: 2013.11

    Venue:Boston, USA  

    researchmap

  • Study on collective morphology dependence of optical reflectanceproperties for a high density array of silicon nanowires

    YAMAGUCHI T, SHIMIZU T, MOROSAWA Y, TAKASE K, SHINGUBARA S

    26th International Microprocesses and Nanotechinology Conference  2013.11 

     More details

    Event date: 2013.11

    Venue:Sapporo  

    researchmap

  • Fabrication of Cu2ZnSnS4 thin films by sulfurization of electrodeposited CuZn/CuSn precursor layers with CS2

    WANG C, SHIMIZU T, TANAKA S, KAWAKAMI A, KONDO A, TERUI T, TAKASE K, SHINGUBARA S

    23rd International Photovoltaic Science and Engineering Conference  2013.11 

     More details

    Event date: 2013.11

    Venue:Taipei, Taiwan  

    researchmap

  • Niナノワイヤを用いた抵抗変化型メモリの形成と評価

    京見 拓也, 大塚 慎太郎, 清水 智弘, 新宮原 正三

    第33回表面科学学術講演会  2013.11 

     More details

    Event date: 2013.11

    Venue:茨城  

    researchmap

  • Effect of confining filaments on the current – voltage characteristics of resistive change memory by using anodic porous alumina

    TANIMOTO Y, HAMADA Y, OTSUKA S, SHIMIZU T, SHINGUBARA S, WATANABE T, TAKANO Y, TAKASE K

    26th International Microprocesses and Nanotechinology Conference  2013.11 

     More details

    Event date: 2013.11

    Venue:Sapporo  

    researchmap

  • Study on conductive filaments formed in ReRAM devices through temperature dependence of electrical transport properties

    HAMADA Y, ITO D, OTSUKA S, SHIMIZU T, SHINGUBARA S

    26th International Microprocesses and Nanotechinology Conference  2013.11 

     More details

    Event date: 2013.11

    Venue:Sapporo  

    researchmap

  • Temperature Dependence of Resistance of Conductive Nano-filament Formed in Ni/NiOx/Pt ReRAM

    OTSUKA S, HAMADA Y, SHIMIZU T, SHINGUBARA S

    ADMETA Plus 2013: Asiasn Session  2013.10 

     More details

    Event date: 2013.10

    Venue:Tokyo  

    researchmap

  • Highly conformal and adhesive electroless barrier and Cu seed formationusing nanoparticle catalyst for realizing a high aspect ratio Cu-filled TSV

    NISHIZAWA S, ARIMA R, INOUE F, SHIMIZU T, SHINGUBARA S

    IEEE 3DIC-2013  2013.10 

     More details

    Event date: 2013.10

    Venue:Sanfrancisco, USA  

    researchmap

  • 金属酸化膜中に形成された導電性フィラメントの抵抗温度依存性

    濱田 佳典, 大塚 慎太郎, 伊藤 大介, 清水 智弘, 新宮原 正三

    第74回応用物理学会秋季学術講演会  2013.9 

     More details

    Event date: 2013.9

    Venue:京都  

    researchmap

  • 高密着性無電解めっきバリア膜の検討とTSVプロセスへの応用

    西澤 正一郎, 井上 史大, 清水 智弘, 新宮原 正三

    MES 2013  2013.9 

     More details

    Event date: 2013.9

    Venue:大阪  

    researchmap

  • Fabrication and absorption properties of ordered Si nanowire arrays using porous aluminum mask

    SHIMIZU T, YAMAGUCHI T, TAKASE K, SHINGUBARA S

    International Porous Powder Materials 2013  2013.9 

     More details

    Event date: 2013.9

    Venue:Izmir, Turkey  

    researchmap

  • メタルアシストエッチングと陽極酸化アルミナを用いた規則配列Si ナノワイヤの形成と反射率特性評価

    山口 卓也, 清水 智弘, 新宮原 正三

    2013年精密工学会  2013.9 

     More details

    Event date: 2013.9

    Venue:大阪  

    researchmap

  • S i ナノワイヤ配列の光学特性の凝集度による相違

    山口 卓也, 清水 智弘, 高瀬 浩一, 諸沢 泰裕, 中原 住雄, 新宮原 正三

    第74回応用物理学会秋季学術講演会  2013.9 

     More details

    Event date: 2013.9

    Venue:京都  

    researchmap

  • Fabrication of Cu2ZnSnS4 thin films by sulfurization of electrodeposited CuZn/CuSn precursor layers with CS2

    WANG C, KONDO A, TERUI T, TANAKA S, TAKASE T, SHIMIZU T, SHINGBARA S

    第74回応用物理学会秋季学術講演会  2013.9 

     More details

    Event date: 2013.9

    Venue:京都  

    researchmap

  • Enhancement of light absorption using bunched Si nanowire arrays

    HAMADA Y, KATO T, OTSUKA S, SHIMIZU T, SHINGUBARA S

    The 2013 International Meeting for Future of Electron Device, Kansai  2013.6 

     More details

    Event date: 2013.6

    Venue:Osaka  

    researchmap

  • 自己組織テンプレートとメタルアシストエッチング法を用いた規則配列Siナノワイヤ形成と評価

    山口 卓也, 清水 智弘, 夛田 芳広, 新宮原 正三

    第60回応用物理学会春季学術講演会  2013.3 

     More details

    Event date: 2013.3

    researchmap

  • 電気化学処理を施した硫酸陽極酸化アルミナを用いた抵抗変化素子の電流電圧特性

    谷本 優輔, 古屋 沙絵子, 大塚 慎太郎, 清水 智弘, 新宮原 正三, 渡辺 忠孝, 高野 良紀, 高瀬 浩一

    第60回応用物理学会春季学術講演会  2013.3 

     More details

    Event date: 2013.3

    researchmap

  • 高アスペクト比TSVへの無電解めっき皮膜形成に向けたPdナノ粒子触媒吸着

    井上 史大, 清水 智弘, 三宅 浩志, 有馬 良平, 伊藤 俊彦, 關 洋文, 篠崎 夕子, 山本 智彦, 新宮原 正三

    第60回応用物理学会春季学術講演会  2013.3 

     More details

    Event date: 2013.3

    researchmap

  • VLS法によるナノワイヤ成長 拡散抑制層追加による成長の改善

    古藤 誠, 清水 智弘, 新宮原 正三

    第60回応用物理学会春季学術講演会  2013.3 

     More details

    Event date: 2013.3

    researchmap

  • ガスセンサ応用に向けた銅錫酸化物ナノツリー構造の形成と評価

    夛田 芳広, 田中 良典, 清水 智弘, 新宮原 正三

    第60回応用物理学会春季学術講演会  2013.3 

     More details

    Event date: 2013.3

    researchmap

  • Fabrication of Cu2ZnSnS4 nanowire arrays using electroplating with nanohole template

    WANG C, TANAKA Y, TERUI T, TANAKA S, SHIMIZU T, SHINGUBARA S

    PCSEC-22  2012.11 

     More details

    Event date: 2012.11

    Venue:HANGZHOU. CHINA  

    researchmap

  • Electric Conduction Mechanism of Resistive Switching Memory using Anodic Porous Alumina

    OTSUKA S, SHIMIZU T, SHINGUBARA S, IWATA N, WATANABE T, TAKANO Y, TAKASE K

    PRiME 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:Honolulu, USA  

    researchmap

  • Large Resistive Switching Phenomenon Induced by Magnetic Field in Nano Conduction Path

    KATO T, SHIMIZU T, OTSUKA S, KYOMI T, SHINGUBARA S

    PRiME 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:Honolulu, USA  

    researchmap

  • Control of Adhesion Strength and TSV Filling Morphology of Electroless Barrier Layer

    ARIMA R, INOUE F, MIYAKE H, SHIMIZU T, SHINGUBARA S

    PRiME 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:Honolulu, USA  

    researchmap

  • Control of the Morphology of Si Nanostructure Using Single-Step Metal Assisted Etching

    YAMAGUCHI T, SHIMIZU T, INOUE F, WANG C, OTSUKA S, TADA Y, INADA M, SHINGUBARA S

    PRiME 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:Honolulu, USA  

    researchmap

  • Temperature dependence of resistance of conductive filament formed by dielectric breakdown

    OTSUKA S, KATO T, KYOMI T, HAMADA Y, TADA Y, SHIMIZU T, SHINGUBARA S

    MNC 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:KOBE, JAPAN  

    researchmap

  • Fabrication of nanostructured Cu2ZnSnS4 using electrodepostion with AAO template

    TANAKA Y, WANG C, KONDOU A, SHIMIZU T, SHINGUBARA S

    MNC 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:KOBE, JAPAN  

    researchmap

  • Control of crystal orientation and diameter of Si nanowire using anodic aluminum oxide template

    SHIMIZU T, SHINGUBARA S

    MNC 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:KOBE, JAPAN  

    researchmap

  • Anodic condition dependence of current-voltage characteristic of resistive change memory using anodic porous alumina

    FURUYA S, OTUKA S, SHIMIZU T, SHINGUBARA S, WATANABE T, TAKANO Y, TAKASE K

    MNC 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:KOBE, JAPAN  

    researchmap

  • 金属触媒とポーラスアルミナを用いた垂直シリコンナノワイヤ配列の形成

    清水 智弘, 夛田 芳裕, 山口 卓也, 新宮原 正三

    第4回マイクロ・ナノ工学シンポジウム  2012.10 

     More details

    Event date: 2012.10

    researchmap

  • Improvement of Adhesion Strength of Electroless Barrier Layer on SiO2 and Control of Deposition Profile in a High Aspect Ratio TSV

    NISHIZAWA S, INOUE F, ARIMA R, SHIMIZU T, SHINGUBARA S

    ADMETA 2012  2012.10 

     More details

    Event date: 2012.10

    Venue:TOKYO, JAPAN  

    researchmap

  • abrication of vertical Cu2ZnSnS4 nanowire arrays using anodic aluminum oxide templates

    王 崇娥, 田中 良典, 照井 通文, 田中 秀吉, 清水 智弘, 新宮原 正三

    第73回応用物理学会秋季学術講演会  2012.9 

     More details

    Event date: 2012.9

    researchmap

  • SiO2上の無電解バリアメタル膜の密着性向上の検討

    西沢 正一郎, 井上 史大, 有馬 良平, 清水智弘, 新宮原 正三

    第73回応用物理学会秋季学術講演会  2012.9 

     More details

    Event date: 2012.9

    researchmap

  • 自己組織テンプレートを用いたナノワイヤ抵抗変化素子の形成と評価

    京見 拓也, 大塚 慎太郎, 武田 佳樹, 清水 智弘, 新宮原 正三

    第73回応用物理学会秋季学術講演会  2012.9 

     More details

    Event date: 2012.9

    researchmap

  • Au10クラスターの電子輸送特性

    小川 智矢, 深谷 一樹, 清水 智弘, 新宮原 正三, 齊藤 正, 稲田 貢

    第73回応用物理学会秋季学術講演会  2012.9 

     More details

    Event date: 2012.9

    researchmap

  • Large resistive switching phenomenon induced by magnetic field in nano conduction path formed in SiO2

    SHIMIZU T, OTUKA S, TAKASE K, SHINGUBARA S

    ICM 2012  2012.7 

     More details

    Event date: 2012.7

    Venue:BUSAN, KOREA  

    researchmap

  • Electrical properties of metal oxide nanowire formed in anodic aluminum oxide template

    SHIMIZU T, KYOMI T, OTSUKA S, TAKASE K, SHINGUBARA S

    ICPS 2012  2012.7 

     More details

    Event date: 2012.7

    Venue:ZURICH, SWISS  

    researchmap

  • All-wet Cu-filled TSV Process Using Electroless Co-alloy Barrier and Cu Seed

    INOUE F, SHIMIZU T, ARIMA R, MIYAKE H, SHINGUBARA S

    ECTC 2012  2012.5 

     More details

    Event date: 2012.5

    Venue:San Diego, USA  

    researchmap

  • Evaluation of crystal structure of porous Si nanowires prepared by metal assisted etching”

    YAMAGUCHI T, SHIMIZU T, WANG C, WANG Q, SHINGUBARA S, KUZNETSOV A, VANACKEN J, MOSHCHALKOV V

    MRS 2012  2012.5 

     More details

    Event date: 2012.5

    Venue:Sun Francisco,USA  

    researchmap

  • Electroless Deposition of Barrier and Seed Layers for Via Last Cu-TSV Metalization

    INOUE F, SHIMIZU T, ARIMA R, MIYAKE H, SHINGUBARA S

    IMFEDK 2012  2012.5 

     More details

    Event date: 2012.5

    Venue:OSAKA, JAPAN  

    researchmap

  • Low Temperature Through-Si Via Fabrication Using Electroless Deposition

    INOUE F, PHILIPSEN H, RADISIC A, AMNINI S, LEUNISSEN P, HMIYAKE H, ARIMA R, SHIMIZU T, ITO T, SEKI H, SHINOZAKI Y, YAMAMOTO T, SHINGUBARA S

    3DIC 2012  2012.2 

     More details

    Event date: 2012.2

    Venue:OSAKA, JAPAN  

    researchmap

▼display all

Industrial property rights

  • 抵抗変化型メモリ及びその作製方法

     More details

    Application no:2012-176343  Date applied:2012.8

    researchmap

Awards

  • Outstanding Reviewer Awards 2024

    2025.3   IOP Publishing  

     More details

Research Projects

  • Development of Antiferromagnetic-Ferromagnetic Phase Transition by an Electric Field Application and Non-Volatile Magnetic Memory Application

    Grant number:21K04159  2021.4 - 2024.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)

      More details

    Grant amount:\4160000 ( Direct Cost: \3200000 、 Indirect Cost:\960000 )

    researchmap

  • Clarification of bactericidal effect using controllable nanostructures

    Grant number:18K19008  2018.6 - 2021.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Challenging Research (Exploratory)

    ITO Takeshi

      More details

    Grant amount:\6110000 ( Direct Cost: \4700000 、 Indirect Cost:\1410000 )

    In order to reveal the antimicrobial mechanism expressed by nanostructures, we controlled the dimensions of the nanostructures and their physicochemical properties to evaluate the effects of these parameters on the antimicrobial properties in this study.
    As a result of the research, we developed a technology that could form nanopillars on silicon substrates with setup dimensions, and found the structural features that make them exhibit antibacterial properties. We also found that physicochemical conditions are also important.

    researchmap

  • 光触媒/多波長吸収金属ナノワイヤーコアシェルアレイによる可視光利用高効率水素生成

    Grant number:18K04877  2018.4 - 2023.3

    日本学術振興会  科学研究費助成事業  基盤研究(C)

    高瀬 浩一, 清水 智弘, 田中 啓文

      More details

    Grant amount:\4290000 ( Direct Cost: \3300000 、 Indirect Cost:\990000 )

    今年度も引き続き、金ナノワイヤーの作成をポーラスアルミナのナノ細孔を利用して行った。ポーラスアルミナの底部にはバリア層と呼ばれる絶縁層が存在するため、電解メッキにて金を埋め込むためには、このバリア層を除去しなければならない。バリア層除去のために、電圧降下処理とエッチング処理を併用した。これらを経て得られる金ナノワイヤーは、場所により長さが異なり、不均一である。また、バリア層を除去してもアルミニウムは直ちに酸化されてしまうので、再現性を得ることが大変困難である。これらの要因が妨げとなり、現在までに均一な長さをもつナノワイヤーの作成には至っていない。また、ナノワイヤーが成長する条件では、比較的長い1μm程度のワイヤーが成長することがほとんどであった。この試料の光学特性を評価した結果、金特有のプラズモン吸収がほとんど見られなかった。これは、長さが長いために、大半の部分はワイヤーの影になり、光が届いていないためであると推察される。
    以上のようなナノワイヤーであることは、承知の上で、原子層堆積法による酸化チタン膜でのナノワイヤーコーティングを実施した。これで、一様、目標とする酸化チタン/金なのワイヤーコアシェル構造を作成できた。得られた複合体が可視光のもと、水を分解できるかどうかを、暗室中でグリーンレーザーを光源に用い水分解実験を試みたところ、ガスの発生を確認できた。現状では、これらのガスが何であるか特定には至っていない。

    researchmap

  • Study of precision control of metal-assisted wet-chemical etching of Si using metal multi-layer as a catalyst

    Grant number:18K04916  2018.4 - 2022.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)

    Tomohiro Shimizu

      More details

    Grant amount:\4420000 ( Direct Cost: \3400000 、 Indirect Cost:\1020000 )

    To improve the Meta-assisted chemical Etching (MacEtch) process to be applicable to the manufacturing of Si devices, hard-diffusion materials used as catalysts or the introduction of diffusion barrier layers between the noble metal and Si are required to eliminate undesirable metal diffusion into the Si substrate, as well as formation of well-defined vertical holes in the substrate by this method. In this study, the usefulness of a metal interlayer interposed between the metal catalyst and Si was demonstrated for the formation of vertical microscale holes in a Si(100) substrate by MacEtch, and the effect of the interlayer was indicated. Additionally, we also showed additives of etching solution is also important to obtain well-defined vertical Si holes using MacEtch.

    researchmap

  • Switching properties of resistive change memory with tiny limited space for conducting filament formation

    Grant number:15K04602  2015.4 - 2018.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)

    TAKASE Kouichi, MAKIHARA Katsunori

      More details

    Grant amount:\4940000 ( Direct Cost: \3800000 、 Indirect Cost:\1140000 )

    We have fabricated a resistive change random access memory (ReRAM) using insulating NiO nanowires, which is expected to indicate good reproducibility of the switching voltage due to spatial limitation of formation of conductive filaments coming from the nanowire width, where Indium metal as the top electrode was attached on the top of the surface of NiO nanowire array and the bottome electrode was the residual aluminum plate. Current-voltage characteristics of In/NiO/Al were investigated using a conventional two-prove method under monopolar operation, where the current compliance limit was set to 1 mA in the SET process. The sample exhibited clear switching behaviors and memory windows with a narrow switching voltage distribution, comparing with the results of ReRAM using thin film insulator. Our results indicate that reduction of the number of conductive filaments is very effective to improve the reproducibility of the switching voltage.

    researchmap

  • Research on CuSn nanotree formationmechanism and its application to higly sensitive gas sensor

    Grant number:25600048  2013.4 - 2015.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Challenging Exploratory Research

    SHINGUBARA Shoso, TADA Yoshihiro, SHIMIZU Tomohiro

      More details

    Grant amount:\4030000 ( Direct Cost: \3100000 、 Indirect Cost:\930000 )

    Three-dimensional nano-tree-like structures consisting of single-crystalline CuSn alloy nanowires branching perpendicularly from their parent branches were observed. The nano-trees were formed by constant potential co-electrodeposition, and the cathode potential range that allowed the growth of the nano-tree structure was very narrow, as small as 0.01 V. The geometry of the branches had a four-fold symmetry around the parent branch. XRD and TEM analysis revealed that the nanowire branches consisted of single-crystalline &#61543;-CuSn, and there were two preferential growth directions: <100> and <110>. The addition of polyethylene glycol (PEG) with a molecular weight of 1000 in the plating bath is essential for the formation of the nano-tree structure. It is speculated that adsorbed PEG molecules on CuSn crystal planes with high Miller indices suppress CuSn alloy deposition, enhancing anisotropic growth of the CuSn crystal to form the nano-tree structure.

    researchmap

  • Formation and evaluation of phovoltaic cells using environmentally friendly CZTS nanowire arrays

    Grant number:25790024  2013.4 - 2015.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Young Scientists (B)

    SHIMIZU Tomohiro

      More details

    Grant amount:\4290000 ( Direct Cost: \3300000 、 Indirect Cost:\990000 )

    In this study, we demonstrated formation of CZTS nano-cylinder arrays on Si nanowire arrays as a template to realize high performance photovoltaic cell using environmentally-friendly CZTS light absorber. The nano-cylinder shaped CZTS arrays indicated high light absorbance property and high photo-induced current compared with film CZTS sample. Additionally, we established sufurization condition for CZTS precursor using CS2 liquid which is reratively safe and easy-to-handle compared with conventional H2S and S powder surfer source. These results will provide the safe and environmentally friendly preparation method, and will realize high performance CZTS photovoltaic cells.

    researchmap

  • Fabrication of ultra high density nanohole array using combination of top-down and bottom-up approaches and its application for a high density magnetic storage media

    Grant number:20241027  2008 - 2010

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (A)

    SINGUBARA Shoso, TANAKA Syukichi, SHIMIZU Tomohiro

      More details

    Grant amount:\26780000 ( Direct Cost: \20600000 、 Indirect Cost:\6180000 )

    We succeeded in the fabrication of ultra high density ferromagnetic nanorod array which density was ranged from 200 Giga to 2.5 Tera per square inch, using porous alumina nanohole array formed on Si substrate. The smallest diameter of nanorod is 10 nm, and the coercivity at room temperature is 2.0 kOe. Furthermore, we succeeded in shrinkage of the ordered nanohole array using a combination of top-down and bottom-up technology, namely, ion beam etching with electron beam lithography and anodic oxidation of aluminum.

    researchmap

▼display all

Devising educational methods

  • Webを利用した授業を行っている。 具体的には情報処理科目では授業資料の公開、課題解答例の公開などをWeb上(CEAS)で行っている。さらに質問の受付や課題の提出もWeb上で行い、授業が教員側からの一方通行にならないように心がけている。 さらに力学では講義だけにならないよう、TAを配置し、その日の講義内容の演習を行い、その場で疑問に感じたことやわからないことを質問させて理解を深める工夫をしている。

Teaching materials

  •  特になし

Teaching method presentations

  •  特になし

Special notes on other educational activities

  •  特になし